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MCL納米雙軸位移臺(tái)M250

品牌：MCL Think Nano
型號(hào)： Nano-M250
產(chǎn)地：美洲美國(guó)
供應(yīng)商報(bào)價(jià)：面議

北京歐蘭科技發(fā)展有限公司更新時(shí)間：2022-03-04 17:31:39

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詳細(xì)介紹

Features

Compact size
Two axis motion
50 μm x 50 μm ranges of motion
0.5 inch aperture
Closed loop control

Typical Applications

Alignment
Nanolithography
Scanning microscopy

Product Description

The Nano-M250 is a compact, two axis nanopositioning system constructed from titanium or invar. The small dimensions of the Nano-M250 allow it to be easily integrated into existing instrumentation for applications such as nanolithography and SEM. The 0.5” center aperture provides a convienent optical pathway or feedthrough for probe assemblies. Internal position sensors utilizing proprietary PicoQtechnology provide absolute, repeatable position measurement with picometer accuracy under closed loop control. The Nano-M250 is also available in high vacuum and ultra high vacuum compatible models.

Technical Specifications
Range of motion (XY)	50 μm x 50 μm
Resolution	0.1 nm
Resonant Frequency (X)	1.0 kHz ±20%
Resonant Frequency (Y)	700 Hz ±20%
Stiffness	1.0 N/μm
θ_roll, θ_pitch(typical)	≤1 μrad
θ_yaw(typical)	≤3 μrad
Recommended max. load (horizontal)*	0.5 kg
Recommended max. load (vertical)*	0.2 kg
Body Material	Invar or Titanium
Controller	Nano-Drive
* Larger load requirements 首ld be discussed with our engineering staff.