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MCL提示/傾斜、旋轉(zhuǎn)納米位移臺(tái)M3Z

品牌：MCL Think Nano
型號(hào)： Nano-M3Z
產(chǎn)地：美洲美國(guó)
供應(yīng)商報(bào)價(jià)：面議

北京歐蘭科技發(fā)展有限公司更新時(shí)間：2022-03-04 17:31:39

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詳細(xì)介紹

Features

Compact design
Three axis motion (Z θ_Xθ_Y)
Low profile: 0.8"
Center aperture: 0.25” diameter
Closed loop control

Typical Applications

Z-axis plus tip/tilt alignment
Nanolithography
Metrology
Nano-alignment

Product Description

The Nano-M3Z is a compact, three axis (Z, θ_X, θ_Y) nanopositioning system with a 0.25” center aperture. The compact design of the Nano-M3Z allows it to be integrated into existing instrumentation where space is restricted. The Nano-M3Z is ideal for demanding applications which require precise alignment capabilities. Internal position sensors utilizing proprietary PicoQtechnology provide absolute, repeatable position measurement with picometer and nanoradian accuracy under closed loop control. The center aperture provides an optical path for laser interferometry or tracking. Nano-M3Z’s can be constructed from aluminum or from invar to reduce themal expansion effects. A related model, the Nano-Man5, adds linear X and Y motion to the the Z-axis capabilities of the Nano-M3Z.

Technical Specifications
Range of motion (Z)	25 μm
Range of motion (θ_X)	1 mradian
Range of motion (θ_Y)	1 mradian
Resolution (Z)	0.05 nm
Resolution (θ_X)	2 nradian
Resolution (θ_Y)	2 nradian
Resonant Frequency	700 Hz ±20%
Stiffness	1.0 N/μm
Recommended max. load (horizontal)*	0.5 kg
Recommended max. load (vertical)*	0.2 kg
Body Material	Aluminum or Invar
Controller	Nano-Drive
* Larger load requirements 首ld be discussed with our engineering staff.